SPUTTER/COATER SYSTEM
Q150 GB
Turbo Pumped System for Glove Box Use
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation. Modular design enables vacuum chamber to be mounted into a glovebox
Key features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
- Modular system for mounting in glove boxes
- Integral glove box pressure monitoring
- Remote operation from touchscreen control panel
Sputter – a high resolution sputter coater for oxidising
and non-oxidising (noble) metals. A wide selection of
sputtering targets are available, including iridium and
chromium, which are highly recommended for FE-SEM
applications.
Carbon coating – a high vacuum carbon coater, ideal for
the production of highly stable carbon films and surface
replicas for transmission electron microscopy (TEM). The
system uses economical 3.05mm diameter carbon rods.
Metal evaporation – a quick change insert that
allows metal evaporation from tungsten baskets or
Molybedenum boats, ideal for thin film applications. For
ease of loading, the metal charge can be loaded into the
evaporation source away from the vacuum chamber.
More convenient when using gloves. The deposition
inserts can be swapped in seconds and the intelligent
system logic automatically recognises which insert is in
place and displays the appropriate operating settings.
Each of the above configurations can be used with a
range of optional accessories (eg film thickness monitor
and various stage configurations). See options for details.
Rapid data entry
At the operational heart of Q150GB is a simple colour
touch screen, which allows even the most inexperienced
or occasional operators to rapidly enter and store their
own process data. To further aid ease of use a number of
typical sputtering and evaporation profiles are provided
Recommended applications
- High resolution SEM and FIB-SEM
- Carbon coating for elemental analysis and carbon coating of TEM grids
Specifikationer
Leverantör
Tillbehör

Sputter targets
We have a wide range of sputter targets for routine…

Carbon sources
Carbon supplies for most carbon evaporator systems, including coaters from…

